In Partnership with SOSLAB

The Korea Institute of Machinery and Materials (KIMM)) have successfully commercialized 2D LiDAR sensors for semiconductor wafer transfer equipment.

The Korea Institute of Machinery and Materials (KIMM) have successfully commercialized 2D LiDAR sensors that are mounted on equipment for transferring semiconductor wafers in partnership with SOSLAB, a professional LiDAR sensor provider.

LiDAR sensors are devices that continuously emit millions of laser beams per second and measure distance based on the time it takes for the laser beams to return to the sensor. These sensors then use this information to identify the surrounding environment three-dimensionally. As such, this technology is an essential component for autonomous driving.

The overhead hoist transport (OHT) systems, an autonomous operating system that transfers wafers by moving them alongside rails installed on the ceiling, are applied within the semiconductor production lines. Two to four LiDAR sensors are required for a single OHT system, and until now, Korea has solely depended on foreign countries, such as Germany and Japan, for the production of such LiDAR sensors.

A research team led by Ha Chang-wan, senior researcher at the Department of AI Machinery, has cooperated with SOSLAB, a LiDAR sensor production company, and SEMES, an end-user company for such services, to commercialize the LiDAR sensor for semiconductor wafer transfer equipment. Through cooperation, the team has successfully improved the product performance and acquired the mass production technology.

The research team has cooperated with the relevant companies, and started developing the customized products fitted for actual semiconductor production lines. Also, by conducting performance tests together with the end-user company, the team has been able to maximize the reliability of the field application.

Through the product optimization and optical path alignment improvement for mass production, the team has improved the LiDAR sensor’s measurement resolution and accuracy, which are the key functions of the LiDAR sensor. Also, by automating the calibration and performance testing stages after the product assembly, the team has acquired the technology for mass production.

This technology is expected to replace the annual imports of about 4,000 units of 2D LiDAR sensors for semiconductor wafer transfer equipment, based on the end-user company demands. In addition, it is expected to be applied in the development of various LiDAR sensors in the future, for the establishment of autonomous driving, smart mobility, and smart infrastructure.

Ha stated that it is a meaningful opportunity for government-funded research institutes, domestic companies, and companies demanding services to actively cooperate in the localization of products that Korea has, up until now, imported. He added that, through this development, it will be possible to more stably protect the domestic semiconductor ecosystem from changes in the external environment, such as Japan’s tightening of export regulations.

Jeong Ji-seong, CEO of SOSLAB, also expressed his gratefulness for having this opportunity to contribute to strengthening the national technological power. He further stated that the company will do its best to become the world’s best LiDAR sensor provider within the autonomous driving and smart infrastructure markets.

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